XTrace is a microfocus X-ray source that can be paired with any SEM with tilted flange slots. The use of this device enables SEM to have complete micro area XRF spectral analysis capabilities. For elements in the range of medium to heavy elements, the detection limit has been increased by 20-50 times. In addition, because the signal excitation depth of X-rays is deeper than that of electron beams, this device can also detect information from deeper samples.

This device adopts X-ray capillary tube technology, which can generate high fluorescence intensity even in very small sample areas. The X-ray capillary tube collects most of the X-rays from the X-ray source and focuses them into an X-ray spot with a diameter of 35 microns.

XFlash using QUANTAX EDS * system ® The series of electric refrigeration energy spectrum probes can collect the X-ray fluorescence spectra generated. XFlash ® The electric refrigeration energy spectrum probe provides the entire system with a very high energy resolution and powerful signal acquisition capability. For example, using a probe with an effective area of 30 mm ², the input count rate for analyzing metal elements can reach 40 kcps.

The X-ray capillary tube technology greatly enhances the fluorescence intensity, and at the same time, the low background of the fluorescence spectrum increases the sensitivity of the system to trace elements. Compared to signals excited by electron beams, its detection limit can be increased by 20-50 times. Moreover, because the X-ray source excitation signal is more effective for high atomic number elements, the detection limit for high atomic number elements can be increased to 10ppm.

The QUANTAX energy spectrometer system and micro area fluorescence spectrometer system can be combined and used in the same user interface to complement each other and optimize quantitative analysis results.

User friendly design:

Focus on analysis tasks rather than tedious system settings

While using ESPRIT HyperMap for surface distribution analysis, all data was collected and stored for subsequent offline analysis.

Samples can be analyzed in parallel using EDS system and micro XRF system without any sample movement.

The two analysis methods are seamlessly integrated into the same analysis software ESPRIT, and switching analysis methods only requires a click of the mouse.

XTrace does not interfere with any SEM or EDS operations.

With just a small investment, you can obtain the powerful functions of an independent micro area fluorescence spectrometer.

The analysis results are comparable to independent systems.

After tilting the sample, it can be distributed over a larger area.

Provide three primary filters to suppress diffraction peaks.

Directly utilize the scanning electron microscope sample stage without the need for additional sample stage equipment.

By rotating the scanning electron microscope sample stage, it is easy to avoid the appearance of diffraction peaks in the spectrum.

Tilt the sample to obtain a small beam spot diameter.

Comparison of resolution before and after sample tilt

(Sample: Chromium star shaped line scanning step size: 25 µ m) Left image: Sample stage not tilted Right image: Sample stage tilted 30 ° towards the X-ray source, showing better spatial resolution. ）

schematic diagram

Application example:

XTrace greatly expands the flexibility of scanning electron microscopy elemental analysis. Its application areas include elemental analysis (metals, catalysts, etc.), forensic science (coatings, glass, gun residue, etc.), geology, and many other fields.

Characterization of multi-layer samples:

The use of XTrace for analyzing multi-layer samples has special advantages. Due to the complex internal structure of multi-layer samples, it may not be possible to observe some of the structures using only an energy spectrometer.

Distribution diagram of copper as a single element

(Sample: PCB multi-layer board, left image: optical image; Right image: secondary electronic image)

(Left image: Micro area fluorescence spectrum distribution of copper element in the secondary electron image area. The white rectangular area is the energy spectrometer surface distribution analysis area in the right image. Right image: Overlapping image of secondary electron image and energy spectrometer copper element surface distribution map. The area indicated by the white arrow is the solder joint, which can be seen in the micro area fluorescence spectrum distribution map, but these solder joints cannot be observed in the energy spectrum distribution map. The reason for this difference is that the depth of the signal excited by X-rays is deeper.)

Distribution diagram of multiple elements in the sample

Multi element surface distribution maps of Micro XRF (left) and EDS (right). The figure shows Cu, Ba, Au, and Al elements. From the comparison of the two figures, it can be seen that the location of Au element is much more than what is shown in the element surface distribution map of the spectrometer. ）

Exhausting it, let scanning electron microscopy do more.

(Photo of copper alloy (left) and comparison of XRF spectrum and EDS spectrum (right). From the red XRF spectrum, it can be seen that there are many trace elements present in the sample. The quantitative analysis results from the XRF spectrum indicate that the sample is brass (CuZn33). ）

Identification of metals and alloys with higher reliability:

The high sensitivity of micro area XRF makes it very suitable for the analysis and identification of alloys, especially small metal particles, such as fragments generated by engine wear.

Analysis of PCB board components and circuits:

Utilizing the high sensitivity and signal excitation depth of XRF for trace elements has particular advantages in analyzing such samples. PCB boards may contain harmful elements prohibited by the RoHS directive. These elements can be more reliably detected by microzone XRF, especially since RoHS and other directives require devices to have very low detection limits.

Metals and harmful elements in polymers:

Polymers are typically used in engineering to achieve specific purposes. This includes using metals and minerals as additives to achieve engineering goals. XTrace can be used to detect additives in polymers and characterize their surface distribution. For example, the testing of toy products in the RoHS directive.

Analysis of Micro Area XRF and EDS Surface Distribution of PCBd

(For the micro area XRF (top image) and EDS (bottom image) element surface distribution maps of the same PCB sample area.). Both analyses use the same color to identify the same element. The different color differences observed in the two images are due to the deeper penetration depth of X-rays into the sample. Copper is significantly enriched in deeper structural layers. The shadows in the micro area XRF surface distribution map are caused by the tilted X-ray source relative to the sample surface and the uneven morphology of the sample surface. The shadow effect can be reduced by tilting the sample towards the X-ray source. ）

Images and spectra of polymers

A standard organic compound optical image photo ƒ (left) and spectrum (right) used for metal and harmful element detection testing. The micro area XRF spectrum ƒ (red) shows the presence of trace elements such as Ni, Hg, Pb, and Br. And these elements cannot be detected by EDS ƒ (blue). The acquisition conditions for the two spectra are the same, both collected for 300 seconds with an input count rate of 6 kcps.

Familiar operating interface:

XTrace analysis software is integrated into ESPRIT software along with Bruker's other microanalysis equipment software EDS, WDS, and EBSD. This integrated software provides convenience for users

(1) All analysis tool operations are performed on the same interface

(2) Switching between different analysis tools with just a click of the mouse

(3) Direct application of different analysis methods can be achieved for the same product location without any sample movement

(4) Easy integration of results obtained from different analysis methods

For XTrace users, another special advantage is that they can combine the quantitative analysis results of EDS and micro area XRF to obtain more reliable quantitative analysis results.

Zhiqiang Combination - Combining XRF and EDS Quantitative Methods to Obtain More Accurate Results

ESPRIT used an advanced Fundamental Parameter (FP) method without standard samples to obtain accurate and reliable quantitative analysis results when analyzing micro area XRF spectra. Of course, calibration standards can also be used for further optimization.

The ESPRIT software allows for the simultaneous use of quantitative results from micro area XRF and EDS, thereby highlighting the advantages of both analytical methods. For light elements, EDS quantitative analysis results are very reliable; Meanwhile, the detection limit of micro area XRF is as low as 10 ppm when analyzing medium or heavy elements. This means that by combining the quantitative results of EDS and micro area XRF using ESPRIT software, accurate results that have never been obtained by any other energy dispersive spectrometer to date can be obtained.

Flexible analytical methods:

In addition to using the movement of the scanning electron microscope sample stage for point analysis and line scanning, this system can also perform single or multiple XRF surface distribution analysis. The surface distribution data is stored in the ESPRIT HyperMap database, which contains complete spectral data for each point. With this database, any desired offline analysis can be conducted at any time.

Point analysis:

After placing the cross cursor of the mouse at any point on the super surface distribution map, the spectrum of that point will appear in the spectrum column. In this way, it is convenient for users to quickly determine the composition of the elements at the current location.

Line scan:

By selecting any line on the super surface distribution map, the distribution of elements on that line can be obtained, which can be a qualitative line scan distribution map or a quantitative line scan distribution map.

Selection analysis:

On the super surface distribution map, selection analysis can also be performed. After selecting any shape on the map, such as rectangle, ellipse, etc., the component information of all points in that area will be integrated and displayed in the same spectrum.

Phase analysis:

The results of surface distribution analysis are sometimes very complex and difficult to interpret, especially when there are multiple elements present in the sample. At this point, the ESPRIT automatic phase analysis tool can identify regions with similar components and classify them as different chemical phases in the sample.

*XTrace requires a pre-installed QUANTAX energy-dispersive X-ray spectrometer (EDS), consisting of XFlash® silicon drift detector, SVE signal processing unit and system PC.