Shenzhen Wofei Technology Co., Ltd. specializes in research and development, design, and manufacturing of high-purity process gas systems, electronic special gas process exhaust gas treatment equipment, and local scrubber

The WFS-100F adsorption type local scrubber exhaust gas treatment equipment can treat various types of gases used in etching processes and chemical vapor deposition processes in industries such as semiconductors, liquid crystals, and solar energy, mainly including SiH4、SiH2Cl2、PH3、B2H6、TEOS、H2、CO、NF3、SF6、C2F6、WF6、NH3、N2O Wait.