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Small 5L vacuum plasma cleaning machine
Product Introduction: Small scale production or laboratory use, used for material surface cleaning, modification and etching to enhance the hydrophili
Product details
Product Features
The product is mainly suitable for small-scale production/scientific experiments
The device is small in size, compact in structure, easy to operate and maintain
Introducing core plasma technology from Germany
Imported 316 stainless steel material, corrosion-resistant
Imported needle valve precision flow control meter
Two process reaction gas channels
Can be customized according to customer needs
Industry Applications
Basic Parameters
| Material of the cavity | 316 stainless steel |
| power frequency | 40khz/13.56mhz |
| Capacity (L) | 5L |
| Power (W) | 500 |
| Chamber size (L * W * H) mm | Diameter 150 * 280 |
| Dimensions (L * W * H) mm | 660*700*600 |
| 真空度 | 30pa-100pa |
| gas flow rate | 0-100ml/s |
| cleaning time | Adjustable from 1-100 minutes |
| cooling method | air cooling |
| Gas channel | Two working gases, O2 , Ar and others |
| Control method | human-machine interface |
| Vacuum chamber temperature | <50℃ |
| vacuum pump | Oil pump/dry pump (optional) |
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