Shenzhen Dongxin High tech Automation Equipment Co., Ltd
Home>Products>Small 5L vacuum plasma cleaning machine
Small 5L vacuum plasma cleaning machine
Product Introduction: Small scale production or laboratory use, used for material surface cleaning, modification and etching to enhance the hydrophili
Product details

Product Features


The product is mainly suitable for small-scale production/scientific experiments

The device is small in size, compact in structure, easy to operate and maintain

Introducing core plasma technology from Germany

Imported 316 stainless steel material, corrosion-resistant

Imported needle valve precision flow control meter

Two process reaction gas channels

Can be customized according to customer needs

Industry Applications


Basic Parameters


Material of the cavity 316 stainless steel
power frequency 40khz/13.56mhz
Capacity (L) 5L
Power (W) 500
Chamber size (L * W * H) mm Diameter 150 * 280
Dimensions (L * W * H) mm 660*700*600
真空度 30pa-100pa
gas flow rate 0-100ml/s
cleaning time Adjustable from 1-100 minutes
cooling method air cooling
Gas channel Two working gases, O2 , Ar and others
Control method human-machine interface
Vacuum chamber temperature <50℃
vacuum pump Oil pump/dry pump (optional)


Online inquiry
  • Contacts
  • Company
  • Telephone
  • Email
  • WeChat
  • Verification Code
  • Message Content

Successful operation!

Successful operation!

Successful operation!