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Product details
Product Introduction
Used to capture volatile components (organic pollutants) on the surface of 8-inch and 6-inch silicon chips. (SW-8400)
Used to capture volatile components (organic pollutants) on the surface of 12 inch silicon chips. (SW-12400)
Capture volatile gases from single-sided silicon chips, easy to operate.
The heating furnace adopts an inverted hanging method, which only captures and samples the gas generated on the front side of the chip.
Used to capture volatile components (organic pollutants) on the surface of 12 inch silicon chips. (SW-12400)
Capture volatile gases from single-sided silicon chips, easy to operate.
The heating furnace adopts an inverted hanging method, which only captures and samples the gas generated on the front side of the chip.
The heating furnace can heat up to a maximum of 500 ℃.
The heating furnace is sealed with an O-ring (polyimide material) for no leakage.
Generally, PAT (with a content volume of 10ml and filled with 2.5g Tenax GR) is used to capture gas. Other manufacturers' corresponding capture sampling tubes can also be used for sampling.
The heating furnace is sealed with an O-ring (polyimide material) for no leakage.
Generally, PAT (with a content volume of 10ml and filled with 2.5g Tenax GR) is used to capture gas. Other manufacturers' corresponding capture sampling tubes can also be used for sampling.
Equipped with a cooling water circulation device.
Equipped with anti overheating devices, interlocking safety devices, emergency stop buttons, water leakage sensors (optional) and other safety prevention devices.
Equipped with anti overheating devices, interlocking safety devices, emergency stop buttons, water leakage sensors (optional) and other safety prevention devices.
Technical Parameter
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way
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Hanging method
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Capture silicon chip size
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8 "or 6", expansion ring (12400 type, 12 ") needs to be added for sizes below 5"
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O ring
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Sealing part diameter 220mm (polyimide)
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Quartz heating furnace
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Transparent quartz material
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Heating method of heating furnace
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Independent heating method for top and bottom plates
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Heating furnace operating temperature
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Commonly used 400 ℃ (up to 500 ℃)
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Heating furnace cooling
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Cooling water circulation device
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Thermal insulation pipe
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Inert coating treatment on the inner surface
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purge gas
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Usually nitrogen is used, with a maximum flow rate of 500ml/min
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Anti overheating device
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Current 15A, induced current 30mA
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EMERGENCY STOP
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Red, mushroom shaped
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Safety device
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Interlocking structure
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Way of Pressure
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motor drive
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Equipment size
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1140(W)×1106(H)×750(D)mm
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weight
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280Kg
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power supply
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Single phase AC200V, 15A · AC100V, 20A
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Standard attachments:
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PAT (primary adsorption tube):
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2 (not compatible with other companies' capture pipes)
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PAT rack
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1 (not compatible with capture pipes from other companies)
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PAT adapter
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1 (to be used in conjunction with capture pipes from other companies)
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O ring
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2 of them
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Cooling water circulation device
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1 unit (with standard piping)
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Thermal insulation pipe
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1 unit
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gas pipe
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1 set (1/16 "-1/8")
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cable
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1 set
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tool
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1 set
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Operating Instructions
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1 volume
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*Please inquire about the technical specifications of SW-12400 model.
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