Silane is an important new material product widely used in industries such as LCD flat panel displays, semiconductors, and solar energy. With the development of China's semiconductor industry, the demand for silane in China is increasing day by day. However, due to the nascent stage of silane production technology in China, how to analyze the purity of silane is a challenge that various manufacturers need to face
As is well known, the analysis of high-purity gases is a complex process and one of the difficulties in chromatographic analysis; Due to the unique physical properties of silane, its analysis is extremely difficult, requiring not only highly sensitive detectors but also solving the problem of silane combustion when exposed to oxygen.GC-9560-HG helium ionization gas chromatographOvercoming numerous technical difficulties in the analysis of silane, a high-sensitivity helium ionization detector and a dedicated silane sampling system were used to effectively analyze trace ppb level impurities in silane.

Applicable standards:

• GB/T 15909-2009 "Gas Silane for Electronic Industry"

GC-9560-HG Silane Analysis Helium Ionization Gas ChromatographySuitable for detecting trace impurities in high-purity gases and gases used in the electronics industry, with a detection concentration of up to 5ppb. The instrument is equipped with a highly sensitive helium ionization detector and adopts the central cutting technology of Huaai Company. The injection valves equipped with it are all inlet valves with a blowdown protection gas path; The whole machine adopts a multi column box design, and different chromatographic columns can be individually controlled for temperature, which maximizes the optimization of separation conditions and facilitates the aging treatment of different chromatographic columns separately, facilitating the maintenance of the instrument; The instrument is equipped with an automatic calibration system for injection pressure, which overcomes the analysis error caused by insufficient injection volume due to different molecular weights of different base gases.

1GC-9560-HG Silane Analysis Helium Ionization Gas ChromatographyPerformance advantages:
The gas industry is the fundamental industry of the national economy and the "blood" of industrial production. With the rapid development of the national economy, the demand for high-purity gases and gases used in the electronics industry is also growing rapidly. The detection of trace impurities is a key step in the production of high-purity gases and gases for the electronic industry, and the analysis of trace impurities has always been a difficult point in chromatographic analysis. Traditional chromatographic detectors such as thermal conductivity are unable to perform high-purity gas analysis.
Pulse Discharge Helium Ionization Detector (PDIHID) is a highly sensitive universal detector that has a high response to almost all inorganic and organic compounds, making it particularly suitable for the analysis of high-purity gases. It is a detector capable of detecting up to ng/g (ppb) levels. The newly formulated national standard stipulates the use of helium ionization detectors to replace the original thermal conductivity detectors. The national standard "Gas Analysis Helium Ionization Gas Chromatography Method", which is mainly drafted by Hua Ai Chromatography, is also being formulated and will be officially announced and implemented soon.

PDHID detection limit for gas impurities in silane (ppb)

IIGC-9560-HGSystem configuration:

(1) GC-9560-HG helium ionization gas chromatograph (2) helium ionization detector (PDDID)

(3) Central cutting system (4) electronic gas sampling system

(5) Oxygen adsorption and reduction system (6) helium purifier

(7) Special pressure reducing valve for carrier gas (8) Non dead volume dedicated sampling valve
(9) Carrier gas filter (10) Sample filter

(11) Chromatographic Column (12) Standard Gas
(13) High purity helium (purity>99.999%) (14) GC-9560V4.0 version reverse control chromatography work

• Central cutting technology enables full gas analysis:
  The GC-9560-HG helium ionization gas chromatograph adopts a multi valve and multi column center cutting and blowback technology. The system consists of multiple purge type ten way valves and multiple chromatography combinations. The injection, switching, cutting, and blowback processes are automatically controlled by the time program set by the workstation.

• Purging type ten way valve
  GC-9560-HGThe equipped valves are all original imported VICI produced blow through ten way valves with protective gas paths. The valve surface is always in the atmosphere of the carrier gas, avoiding air infiltration into the sample during injection and switching, greatly improving detection sensitivity and accuracy.
• Specially processed chromatographic column technology
  (1) The chromatographic column tube is made of 316L stainless steel material, and the inner walls of the tube have been passivated to prevent problems such as adsorption and carbon monoxide tailing
  (2) The chromatographic column supports have undergone special treatment to avoid issues such as oxygen adsorption
  (3) The pre cut column adopts the national micro packed column technology obtained by Huaai chromatography, which comprehensively improves the separation of samples, balancing separation, stability, and speed

• Multi column box separation system
  Gas samples come in various forms and contain a wide range of impurities, requiring multiple chromatographic columns to separate all impurities in the gas sample. Due to the varying optimal working temperatures of different chromatographic columns, it is difficult to find the optimal working temperature that is suitable for different columns in the same column box. GC-9560-HG adopts a multi column box design, effectively solving the problem of different operating temperatures required for different chromatographic columns.
  In the daily maintenance of the instrument, due to the different activation temperatures of chromatography columns with different supports such as 5A molecular sieve, if aging is carried out in the same column box, the chromatography columns that cannot withstand high temperatures need to be removed and activated separately. The multi column box design of GC-9560-HG can effectively solve the above problems. Different chromatographic columns can be activated separately in different column boxes, avoiding the problem of disassembling and assembling chromatographic columns in daily instrument maintenance work.
• HP-2 helium purifier:
  GC-9560-HGUsing high-purity helium gas as the carrier gas, the purity of helium directly affects the sensitivity of the entire instrument to detect impurities. Experimental results have shown that the purity of the carrier gas used for high-purity gas analysis is at least one order of magnitude higher than the background purity of the gas sample.
  The HP-2 helium purifier is a specialized carrier gas purifier produced by VICI company. Its purification substrate is a non-volatile adsorbent alloy, and the adsorbent particles have a layer of oxide film on the surface that needs to be activated by heating. The activation process must be completed in a vacuum or inert gas environment, which allows helium to freely diffuse and prevent the formation of an oxygen purification layer, while also adsorbing impurity gases. The adsorbent material of HP has good thermal stability, including two temperature control ranges.
  Purified gases: He, Ar, Ne, Kr, Xe, Rn
  Maximum operating pressure: 1000Psi
  Gas removal: H₂、 O₂、 N₂、 CO、CO₂、 CH₄、 H₂O、NO、NH₃、 CF₄class
  Residual concentration: ≤ 10pppb
• Injection pressure calibration system
  The traditional chromatograph uses the method of controlling the flow rate at the outlet of the injection valve to control the injection volume in the quantitative tube. Experimental results have shown that this method has significant analytical errors
  Taking the analysis of high-purity hydrogen as an example: standard gas is composed of six impurities in helium gas, while sample gas is composed of six impurities in hydrogen gas; Due to the different molecular weights of helium and hydrogen, the injection volume may vary at the same flow rate
  GC-9560-HGEquipped with a pressure correction system to overcome the problem of inconsistent injection volume caused by different base gases and ensure the accuracy of data.
• Non dead volume sampling valve
  GC-9560-HG is equipped with a dedicated sampling valve without dead volume and adopts a sampling method with blow protection, effectively avoiding the problem of air residue and minimizing the impact of the sampling process on analysis.
• Special pressure reducing valve for carrier gas
  Due to the presence of a large amount of dead volume, ordinary pressure reducing valves directly affect the purity of the carrier gas output by the pressure reducing valve, resulting in a high concentration of background impurities in the carrier gas, thereby affecting the detection limit of the entire system.
  The GC-9560-HG helium ionization gas chromatograph is equipped with a fully stainless steel carrier gas pressure reducing valve with two-stage stabilizing function, which greatly improves pressure stability, ensures baseline stability, and also reduces dead volume in the valve body, further improving detection sensitivity.

GC-9560-HGAnalysis rendering: