The SEM-N series polyimide curing oven is a clean process oven designed specifically for polyimide hard baking and curing applications.

Many front-end machines in semiconductor manufacturing environments are suitable for polyimide curing.

This expensive process often results in equipment that is not suitable for polyimide curing in terms of cleanliness, inert atmosphere capacity, cycle time, or data acquisition.

SEM-N series ovens optimize polyimide curing process for semiconductors

Wafer devices. It can shorten the cycle time and provide a consistent and repeatable curing process for all wafers in the product load. We have designed a pressure relief system for the SEM-N series ovens, which includes a detachable 'cold trap' and an easy to clean condensate collector to prevent polyamide from accumulating in the furnace exhaust.

Standard features:

Recycled air is 100% filtered through a 99.99% HEPA filter for ISO Class 5 (Class 100) or higher operations

Integrated PC interface with real-time graphic display function

Oxygen monitoring system

U 16 kW heater capacity

Automatic water control with stainless steel water-cooled coil

The maximum temperature can reach (450 ° C)

Fast cycle time, up to 5 ° C per minute

The temperature uniformity is ± 1%

Each layer has a maximum weight of 23 kilograms