Park Systems Atomic Force Microscope XE-15

Instrument Introduction:

Park XE-15 has comprehensive sample compatibility. Its multiple sample stage designs provide a convenient and reliable testing environment for samples of different sizes, shapes, and quantities. The decoupled closed-loop XY scanner eliminates bending effect errors and provides linearity. The true non-contact scanning mode expands the suitable sample types, greatly extends the probe life, and reduces usage costs.

Park Systems Atomic Force Microscope XE-15 Technical Parameters:

scanner

XY scanner

Flexible guidance closed-loop control single module scanner

Scanning range 100 μ m * 100 μ m (optional 50 μ m * 50 μ m)

Plane offset:<2nm (40 μ m * 40 μ m scan)

Z scanner

Flexible guidance powerful scanner

Scanning range 12 μ m (optional 25 μ m)

Resonance frequency:>5kHz

Surface imaging noise: 0.03nm

sample stage

Sample stage type: 16 site sample stage/150mm diameter vacuum adsorption stage (optional 200mm diameter vacuum adsorption stage)

Sample size: 150mm * 150mm * 20mm

Sample weight: 500g maximum

Sample stage movement range: 150mm * 150mm (optional 200mm * 200mm)

Key Features:

1、 Innovative multi-point sample stage design, providing work efficiency

Up to 16 samples can be scanned in one operation

● Simple sample placement and fast scanning

Greatly improves the accuracy and repeatability of data

2、 Support ultra large samples to meet the development needs of the industry

● Supports 200mm wafers to meet the current and future needs of users

Specially designed to meet the actual needs of semiconductor related users

3、 Rich selection of functional modes

● Improve support for various SPM functions

● Supports multiple optional measurement modes

● Supports various optional accessories, with superior expansion performance