Microwave Materials Science Workstation - Microwave Energy Chemical Vapor Deposition System

Main purpose:
Mainly used in semiconductors, large-scale insulation materials, most metal materials and metal alloy materials, graphene, nanomaterials, carbon fibers, silicon carbide
In the field of new materials and processes such as coating

Product features:
★ Convenient operation: The gas path connection method adopts KF quick connection flange structure, which simplifies the material picking and placing process. Only one clamp is needed to complete the gas path connection,
Easy to operate, eliminating the complex flange installation process and reducing damage caused by installation
★multi-function:Three heating methods are available: pure microwave, traditional electric heating, and hybrid heating; Adapt to heat treatment of any non flammable sample, including metals and alloys
★Exclusive developed microwave field specific sensor for precise temperature control
★Safety:Exclusive use of four level interlocking protection shielding measures to prevent leakage, safe and reliable microwave shielding cavity design, multiple leak prevention protections
*Equipped with professional microwave suppressors as standard
*Built in microwave leakage sensor
★Energy saving:Long service life: Magnetron microwave heating avoids and solves the problem of traditional heating elements such as heating wires, silicon carbon rods, and silicon molybdenum rods being easily damaged,
It also avoids the need for heating elements
Various losses caused by damage, including time, experimental progress, repair costs, etc
★ Adopting stepless adjustability, high stability and long service lifeContinuous wave micro wave sourceEnsure that the equipment can operate continuously and stably for a long time
★Embedded microcomputer integrated temperature control system; Realize stable temperature control
★ No need for oven drying process: The entire furnace chamber generates heat by itself, and the heating is uniform
★ Microwave energy is available immediately, without thermal inertia, and easy to control temperature
★ The furnace body is equipped with an automatic cooling fan
★ The protective tube adopts high-temperature resistant alloy tube, and the gas tube adopts a sleeve or VCR interface, which is easy to install
★ Equipped with swivel wheel adjustable feet for easy movement and fixation

Optional features:
1. Multi zone independent heating module: add D after the model number
Multiple independent heating and control in different temperature zones (with 2 temperature zones as standard)
Two or more temperature zones can be optionally selected
◆ Usually used for material synthesis involving gas phase or volatile components at high temperatures
The length of both the heating zone and the constant temperature zone can be adjusted.
2. Vertical or other sizes can be customized according to user needs

Technical parameters:

Model/model	WBQXCJ-4
Heatable material	Any material that is not flammable or explosive
microwave frequency	2.45GHZ±50MHz
Heating method	Pure microwave heating, traditional electric heating, mixed heating
Maximum power/KW (continuous, adjustable)	4
Sample cavity size/mm	Standard configuration: Φ 45mm; Length 1200mm. Customizable according to user needs
Sample cavity (material)	quartz tube	corundum tube
Temperature control range/℃	Room temperature -1200 ℃	Room temperature -1500 ℃
Temperature testing component	Microwave field specific sensor
Temperature resolution/℃	0.1
Temperature control accuracy/℃	± 1 below 1200 ℃; Above 1200 ℃ ± 2 ℃
Temperature deviation/℃
Temperature stability fluctuation/℃
Cooling method	Standard air cooling (optional water cooling)
Length of constant temperature zone/mm	Standard 100 can be customized according to user needs
Heating rate (standard)	0～200℃/min Arbitrary setting, programmable, segmented heating
Temperature control method	10 segments with adjustable process parameters, 7-inch touch screen operation, and data storage function; Provide manual, automatic, and constant temperature control modes, with real-time curve display
control gas	Control gases: H2, CH4, Ar, N2, other gases optional
flow control	Standard configuration includes 2 sets of quality flow controllers: Seven Star Huachuang (with vacuum protection valve at the rear, matched with vacuum mode); Accuracy: 0.8%
Maximum withstand voltage	1MPa； Control response time: 10ms
Vacuum system vacuum pump	RVP2008； Pressure range: 10-3 Torr~760 Torr Maximum pumping speed: 8.5 m3/h
vacuum gauge	Digital vacuum gauge: 1atm-10-1 Pa
standard configuration	The quality flow automatic control system is equipped with a control computer and control software, which can display and save growth parameters in real-time
Other configurations of the gas path	Gas cabinets, gas circuits, and valves, etc
port	Stainless steel KF50 flange interface
Power supply voltage (V)	220
Microwave leakage rate/mW/cm2	≤0.4
Dimensions (length, width, height)/mm	1500×750×1550