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Metal filter UCD series
All filter materials are made of SUS316L, so there is no need to worry about corrosion and intermediate products, while also having high heat resistan
Product details
Disc shaped component with filtration accuracy of 0.003 μ m, recommended flow rate of 10-100L/min
All filter materials are made of SUS316L, so there is no need to worry about corrosion and intermediate products, while also having high heat resistance.
Using nitrogen (N2) input, when the pressure on the input side of the filter is 0.2 MPa and the flow rate is 90 SLM, the pressure loss △ on the output side is 0.05 MPa.
The filtration accuracy under fixed or pulsating modes has been confirmed by CNC to reach 0.003 μ m, achieving a significant improvement in the yield of ultra fine ULSI manufacturing.
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