Shenzhen Dongxin High tech Automation Equipment Co., Ltd
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Laboratory plasma cleaning machine
Product Introduction: Laboratory Plasma Cleaning Machine
Product details

Product parameters of laboratory plasma cleaning machine:

model Material of the cavity power frequency Capacity (L) Power (W) Chamber size (LxWxH) mm Overall dimensions(LxWxH)mm
TS-PL02 316 stainless steel 40KHz/13.56MHz 2 300 Diameter 100 * 270 550*600*400
TS-PL05 316 stainless steel
40KHz/13.56MHz
5 500 Diameter 150 * 280 660*700*600
TS-PL10 316 stainless steel
40KHz/13.56MHz
10 600 200*200*270 660*700*600
TS-SY05 quartz glass 13.56MHz 5 300 Diameter 160 * 240 600*420*320

Application fields of laboratory plasma cleaning machine:

Laboratory plasma cleaning machines are widely used in the fields of semiconductors, biomedicine, nanomaterials, optical electronics, flat panel displays, aerospace, scientific research, and general industry.

Application of Plasma Technology in General Industrial Fields

1.1 Electronics industry a. Filling: Improving the adhesion of the filling material Filling refers to protecting electronic components by filling resin. Plasma activation before filling can ensure good sealing, reduce current leakage, and provide excellent bonding performance. Filling provides insulation to prevent the effects of moisture, high/low temperature, physical and electronic stress. It also has the functions of flame retardancy, shock absorption, and heat dissipation; b. Cleaning of bonding board: improving the wire bonding effect; c. Plasma technology is very suitable for improving the bonding performance of plastic materials, such as plastics, metals, ceramics, and glass, before bonding. In application, the loose boundary film is removed, leaving a very clean surface. It can roughen the surface at the atomic level, provide more surface bonding sites, and improve the bonding effect. At the same time, the chemical changes of active atoms in the plasma form strong chemical bonds on the surface of the substrate material.

1.2 Medical Diagnosis a. Activation: Improving the adhesion of cells and biomaterials to clinical diagnostic platforms; b. Ammoniation: Ammoniation provides a binding point for polymer materials to bind with biological and sensor molecules; c. Other functionalities: Improve the selective adhesion of bioactive molecules to cell culture platforms.

1.3 Medical Devices a. Microfluidic Devices: Microfluidic devices require hydrophilic surfaces for the analyte to flow smoothly and continuously; b. Medical catheter: Minimize prothrombin and improve biocompatibility by reducing protein adhesion on the catheter; c. Drug delivery: solving the problem of drug adhesion to the measuring chamber wall; d. Prevent biological contamination: Improve the biocompatibility of medical devices both in vivo and in vitro.

1.4 Optical field a. Lens cleaning: removing organic films; b. Contact lenses: Improve the wettability of contact lenses; c. Fiber Optic: Improving the Optics of Fiber Optic ConnectorsTransmission.

1.5 Rubber a. Surface Friction: Reduce the surface friction of sealing strips and O-rings; b. Bonding: Improve the adhesive's adhesion to rubber by selectively impacting the surface with ions accelerated by plasma or chemical etchingChange the surface morphology to provide more bonding points and improve adhesion.

Application of Plasma Technology in Semiconductor Industry, Solar Energy, and Flat Panel Display

2.1 Semiconductor industry a. Silicon wafer and wafer manufacturing: removal of photoresist; b. Micro Electro Mechanical Systems (MEMS): Removal of SU-8 photoresist; c. Chip packaging: cleaning of lead pads, bottom filling of inverted chips, and improving the bonding effect of sealing adhesive; d. Failure analysis: disassembly and assembly; e. Electrical connectors, aviation sockets, etc.

2.2 Solar Cells: Etching of Solar Cells

2.3 Flat panel display a. Cleaning and activation of ITO panels; b. Removal of photoresist; c. Cleaning at designated locations (COG).

The small desktop experimental plasma cleaning machine produced by our company has the characteristics of small size, compact structure, simple operation and easy maintenance. It is used for laboratory research and small batch production,The ideal choice for nano cleaning, surface activation, and surface modification of small components is very suitable for scientific research experiments in major universities.

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