Advantages and Characteristics
Very high resolution, even rare earth elements with complex spectral lines can be separated to avoid spectral interference and ensure the accuracy of analysis data
The high-voltage power supply circuit of the RF generator with closed-loop control has an improved power control accuracy of over 0.1% compared to traditional high-voltage systems with step-up transformers and high-frequency resistive coils
High precision spectroscopic system:
Reflective spectroscopic system design to avoid introducing additional color differences
Mechanical control accuracy ensures accurate spectral positioning
High resolution telephoto optical path design achieves excellent signal-to-noise ratio and extremely low substrate effect
◆ Temperature controlled light chamber improves measurement stability. After argon gas is injected into the light chamber, it can measure S (180nm) and Sn (190nm) with high accuracy
A dynamic linear range of 5-6 orders of magnitude, suitable for elemental analysis from trace to constant levels
Measurement accuracy and element detection limit, in ppb level
◆ Protection system: equipped with cooling water protection, argon protection, overvoltage protection, overcurrent protection, arc extinguishing protection, etc