number

project

D07-7K type

D07-7B type

D07-7C type

D07-7CM type

1

Flow specifications

(20,30,50,100,200,300,500) SCCM

( 0~1,2,3,5,10) SLM

(0~5,10,20,30,50,100,200,300,500) SCCM

( 0~1,2,3,5,10) SLM

( 0~5,10,20,30,50,100,200,300,500) SCCM

( 0~1,2,3,5,10) SLM

( 0~5,10,20,30,50,100,200,300,500)

SCCM

( 0~1,2,3,5,10) SLM

2

accuracy

±1 % F.S

±1.5 % F.S

±1.5 % F.S

±1.5 % F.S

3

linear

±1 % F.S

±1 % F.S

±1 % F.S

±1 % F.S

4

repeatability

±0.2 %F.S

±0.2 %F.S

±0.2 %F.S

±0.2 %F.S

5

response time

Electrical characteristics: 10 seconds;

Gas characteristics: ≤ 4 seconds

Electrical characteristics: 10 seconds;

Gas characteristics: ≤ 4 seconds

Electrical characteristics: 10 seconds;

Gas characteristics: ≤ 4 seconds

10 sec

6

Air pressure drop

ˉ

ˉ

ˉ

<0.01 MPa

7

Range of working pressure difference

(0.1 ~ 0.5) MPa

(0.1 ~ 0.5) MPa

(0.1 ~ 0.5) MPa

<0.01 MPa

8

temperature coefficient

Zero:≤±0.1% F.S./℃;

Span: ≤±0.2% F.S./℃;

ˉ

ˉ

ˉ

9

Maximum working pressure

1 MPa

1 MPa

1 MPa

1 MPa

10

pressure resistance

3 MPa

3 MPa

3 MPa

3 MPa

11

Ambient Temperature

5 ℃ ~ 45 ℃

5 ℃ ~ 45 ℃

5 ℃ ~ 45 ℃

5 ℃ ~ 45 ℃

12

input/output signal

0 V ~ +5.00 V
(Input impedance greater than 100K, output current not greater than 3mA)

0 V ~ +5.00 V
(Input impedance greater than 100K, output current not greater than 3mA)

0 V ~ +5.00 V
(Input impedance greater than 100K, output current not greater than 3mA)

0 V ~ +5.00 V
(Input impedance greater than 100K, output current not greater than 3mA)

13

power supply

+15 V 50 mA;

-15V 200 mA

+15 V 50 mA;

-15V 200 mA

+15 V 50 mA;

-15V 200 mA

+15 V 50 mA

-15 V 50 mA

14

External dimensions

See Figure 4

See Figure 4

See Figure 4

See Figure 5

15

weight

1.1 kg

1.1 kg

1.1 kg

0.92 kg