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CS200H Mass Flow Controller&Flow Meter
CS200H gas mass flow control is a digital high-temperature product produced by Seven Star flowmeter. Its electrical and mechanical parts adopt a separ
Product details
advantage
Controller operating temperature: 90-120 ℃.
High control accuracy: The product accuracy can reach ± 1.0% S.P. (≥ 35% F.S.).
Quick response, response time ≤ 0.8sec.
Adopting the principle of constant power sensor, corresponding compensation is made when the temperature changes, fundamentally suppressing the zero drift phenomenon of the flowmeter and ensuring the linearity of the sensor.
High end products use specialized metal surface treatment technology, and all surface metal materials in contact with gas are made of 316LVV. The CS200 product has a metal surface roughness of up to 10RA or less, and is manufactured strictly in accordance with SEMI standards.
• Supports dual power supply of ± 8V~± 16V+ 14V~+28V single power supply; Digital, analog input/output.
The product size complies with the internationally recognized SEMI standard, RS485, and DeviceNet communication method.
Technical Parameter
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CS200 |
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model |
CS200-H |
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Valve type |
normally closed |
not have |
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Flow specification (N2) |
(0～2,3,5,10,20,30,50,100,200,300,500) SCCM |
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accuracy |
±1.0% S.P. (≥35% F.S.) |
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linear |
±0.5% F.S. |
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repeatability |
±0.2% F.S. |
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response time |
≤ 1sec |
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Range of working pressure difference |
0.05-0.35MPa flow specification ≤ 10SLM |
＜0.02 MPa |
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Maximum working pressure |
0.45MPa |
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temperature coefficient |
Zero point: ≤ ±0.1% F.S./℃； During adjustment: ≤ ±0.1% F.S./℃ |
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compressive strength |
3MPa |
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Leakage rate |
1×10-11Pa·m3/ sec He |
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Sealing material |
metal seal |
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Ambient Temperature |
Mass flow controller/flowmeter: (90-120) ℃; Control box: (0-50) ℃ |
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Input signal |
Number: RS485 or DeviceNet |
not have |
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output signal |
Number: RS485 or DeviceNet |
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drift |
＜ 0.6% F.S./year without zero point correction |
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power supply |
± 8 to ± 16 VDC (bipolar) or+14 to+28 VDC (unipolar) |
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surface chemical composition |
Cr/Fe ratio ≥ 2.0, CrO thickness ≥ 20 (angstroms) |
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Surface roughness |
10 Ra |
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Standard joint form |
Double card sleeve with a diameter of 6; Double card sleeve 1/4; VCR1/4 male connector; 1.5 ´ C-type sealing joint |
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Form of power connector |
D-type 9-pin male connector; D-type 15 pin male connector; DeviceNet connector |
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Connect high-temperature cables |
2m |
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weight |
1.2Kg |
1Kg |
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