CS100 Mass Flow Controller&Flow Meter-Global supplier

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No. 8 Wenchang Avenue, Beijing Economic and Technological Development Zone (Postal Code: 100176)

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CS100 Mass Flow Controller&Flow Meter

The CS100 product is developed based on the CS series product technology platform of the Seven Star Flow Meter. With constant power sensor technology,

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Product details

advantage

The CS100 product adopts customized design for customers,
Customers can choose ± 15V dual power supply or+24 single power supply as needed;
Metal or rubber seals;
The product size can be selected from products that meet the internationally recognized SEMI standards, or from compact products.

Technical Parameter

CS100

model

CS100A

CS100D

Valve type

normally closed

nothing

normally closed

nothing

Flow specification (N2)

(0～10,20,30,50,100,200,300,500) SCCM
(0～1,2,3,5,10,20,30,50) SLM

(0～10,20,30,50,100,200,300,500) SCCM
(0～1,2,3,5,10,20,30) SLM

Accuracy

±1.0% S.P. (≥35% F.S.)； ±0.35% F.S.(＜35% F.S.)

linear

±0.5% F.S.

Repetitive accuracy

±0.2% F.S.

response time

≤ 1sec

Range of working pressure difference

0.05～0.35MPa； Flow specification ≤ 10SLM
0.1～0.35MPa ； 10<Flow specification ≤ 30SLM
0.25～0.45MPa ； 30<Flow specification ≤ 50SLM

＜0.02 MPa

0.05～0.35MPa； Flow specification ≤ 10SLM
0.1～0.35MPa； 10<Flow specification ≤ 30SLM

＜0.02 MPa

temperature coefficient

Zero point: ≤± 0.05% F.S/℃; Adjustment: ≤± 0.1% F.S/℃

pressure resistance

3MPa

10MPa

3MPa

10MPa

Leakage rate

1×10^-9Pa·m³/ sec He（1×10^-8atm·cc / sec He）

Sealing material

Fluororubber

metal seal

Maximum work pressure

0.45MPa

Ambient Temperature

（5～45）℃

Input signal

Simulation:
(0～5)VDC

Number: RS485

nothing

not have

Simulation:
(0～5)VDC

Number: RS485

not have

output signal

Simulation:
(0～5)VDC

Number: RS485

Simulation: (0-5) VDC

Number: RS485

Simulation:
(0～5)VDC

Number: RS485

Simulation:
(0～5)VDC

Number: RS485

Form of power connector

D-type 9-pin
Yang connector;

D-type 15 needle
male connector

D-type 9-pin
Yang connector;

O-type 3-pin
Yang connector

D-type 15 needle
male connector

D-type 9-pin
Yang connector;

D-type 15 needle
Yang connector

D-type 9-pin male connector;

O-type 3-pin male connector

D-type 15 pin male connector

D-type 9-pin
Yang connector;

D-type 15 needle
male connector

D-type 9-pin
Yang connector;

O-type 3-pin
male connector

D-type 15 needle
Yang connector

D-type 9-pin
Yang connector;

D-type 15 needle
male connector

D-type 9-pin male connector;

O-type 3-pin male connector

D-type 15 pin male connector

power supply

±15V

+24V

±15V

+24V

±15V

+24V

±15V

+24V

Auto reset

support

Surface roughness

25μinch Ra

Standard joint form

Double card sleeve with a diameter of 6; Double card sleeve with a diameter of 3; Double card sleeve 1/4 ´ ´; Double card sleeve 1/8 inch;

VCR1/4 ´ male connector;

6 (inner) x1 hose connector; 5 (inner) x1.5 hose connector; φ 4 (inner) x1 hose connector

VCR1/4 "male connector

weight

1.2Kg

1Kg

1.2Kg

1Kg

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