Product application

Vacuum coated solar semiconductor, petroleum and petrochemical
Coal metallurgy gas production, gas distribution, environmental protection, various analytical instruments

Technical Parameter

Technical specifications: Amass mass flow controller Amass mass flow meter
Range: 10SCCM-200SLM

Measurement and Control Range: Controller Valve Control Range 50:1 Flow Meter Range Ratio 100:1
Accuracy: Flow rate: ± 1% F.S
Repetition accuracy: ± 0.2% F.S
Response time: ≤ 2S
Analog quantity: 0-5V
Power supply: ± 15V
Working temperature: 0-50 ℃
Work pressure: Work pressure difference: 0.03-0.5MPa Work pressure drop:<0.01Mpa
Maximum withstand voltage: 6MPa
Electrical connection: DB15 hole
Leakage rate: 1 × 10-9 SCCSHe
Temperature coefficient: ± 0.015% F.S/℃
Base material: Aluminum alloy or 316L stainless steel
Sealing materials: fluororubber, chloroprene rubber, nitrile rubber
Connector: VCR1/4; Swagelok φ 6 and customer specified